Isakhelo esikhokelayo se-IC yitekhnoloji yokuvelisa ibhodi yesekethe eprintiweyo edibanisa iingcingo kunye namacandelo e-elektroniki ngokusebenzisa iintambo zetsimbi.Le teknoloji isetyenziswa ngokubanzi ekwenzeni iisekethe ezidibeneyo (IC) kunye neebhodi zeesekethe eziprintiweyo kwizixhobo zombane.Eli nqaku liza kwazisa ukusetyenziswa kunye neenzuzo ze-IC yezakhelo ezikhokelayo, kwaye zihlolisise isicelo kunye nokusetyenziswa kwe-photolithography kwi-IC ehamba phambili yokuvelisa isakhelo kunye nezinto ezisetyenzisiweyo.
Okokuqala, isakhelo esikhokelayo se-IC siteknoloji eluncedo kakhulu enokuphucula kakhulu uzinzo kunye nokuthembeka kwezixhobo zombane.Kwimveliso ye-IC, iifreyimu ezikhokelayo ziyindlela ethembekileyo yokudibanisa umbane eqinisekisa ukuba amacandelo e-elektroniki kwibhodi yesekethe axhunyiwe ngokuchanekileyo kwi-chip ephambili.Ukongeza, iifreyimu ezikhokelayo ze-IC zinokuphucula ukuthembeka kweebhodi zeesekethe kuba zinokwenza iibhodi zesekethe zibe namandla omatshini aphezulu kunye nokumelana nokugqwala okungcono.
Okwesibini, i-photolithography yitekhnoloji esetyenziswa ngokuqhelekileyo ekwenzeni iifreyimu ezikhokelayo ze-IC.Le teknoloji isekelwe kwinkqubo yefotolithography, eyenza iifreyimu zelothe ngokubeka iifilimu ezinqabileyo zesinyithi ekukhanyeni kwaye zifakwe ngesisombululo sekhemikhali.Itekhnoloji ye-Photolithography ineenzuzo zokuchaneka okuphezulu, ukusebenza kakuhle, kunye neendleko eziphantsi, ngoko ke isetyenziswe ngokubanzi kwi-IC yokwenziwa kwesakhelo esikhokelayo.
Kwimveliso yesakhelo esikhokelayo se-IC, eyona nto isetyenziswayo yifilimu encinci yesinyithi.Ifilimu encinci yesinyithi inokuba lubhedu, i-aluminium, okanye igolide, kunye nezinye izinto.Ezi filim zesinyithi ezicekethekileyo zidla ngokulungiswa ngokufakwa komphunga womzimba (PVD) okanye iindlela zokubeka umphunga kwiikhemikhali (CVD).Kwimveliso yesakhelo esikhokelayo se-IC, ezi filim zentsimbi zigqunywe kwibhodi yesekethe kwaye emva koko zibhalwe ngokuchanekileyo buchwephesha befotografi ukuvelisa izakhelo ezilungileyo.
Ukuqukumbela, itekhnoloji yesikhokelo ye-IC idlala indima ebalulekileyo kwizixhobo zombane zanamhlanje.Ngokusebenzisa itekhnoloji ye-photolithography kunye nezixhobo zefilimu ezicekethekileyo zentsimbi, ukuchaneka okuphezulu, ukusebenza kakuhle okuphezulu, kunye neefreyimu zexabiso eliphantsi zingenziwa.Inzuzo yale teknoloji kukuba inokuphucula ukuthembeka kunye nokuzinza kwezixhobo zombane, ngaloo ndlela ibe negalelo kuphuhliso lobuchwepheshe be-elektroniki bale mihla.
Ixesha lokuposa: Feb-28-2023